Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The atomic force microscope (AFM) is a promising new instrument for studying the surface structure of both conductors and insulators. In mapping a graphite surface with an insulating stylus, we have achieved a lateral resolution better than 2.5 Å, although the maximum corrugation amplitude measured is only 0.2 Å. In boron nitride, an insulator, the hexagonal structure with a lattice constant of 2.504 Å is resolved, too. © 1987 Elsevier Science Publishers B.V. (North-Holland Physics Publishing Division).
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Krol, C.J. Sher, et al.
Surface Science
K.N. Tu
Materials Science and Engineering: A