Conference paper
Reliability projection for ultra-thin oxides at low voltage
J.H. Stathis, D.J. DiMaria
IEDM 1998
We report a sharp threshold at 4 V in the growth rate of breakdown spots in thin films of [Formula presented] on silicon. This provides some of the first information concerning the electronic structure of the breakdown spot. © 2003 The American Physical Society.
J.H. Stathis, D.J. DiMaria
IEDM 1998
F. Palumbo, S. Lombardo, et al.
Microelectronic Engineering
J.H. Stathis, B.P. Linder, et al.
Microelectronics Reliability
D. Jousse, Jerzy Kanicki, et al.
Proceedings of SPIE 1989