P.M. Mooney, F. Legoues, et al.
Applied Physics Letters
The (buried) interface between a polycrystalline Al thin-film feature and its substrate (single crystal Si) was characterized with x-ray microdiffraction. Using a focused x-ray beam (effective spot size on the specimen ∼2×12 μm) with the Si 004 reflection, topographic images of the Si around and under the metallization feature were constructed. Comparison with shear-lag model calculations indicate that the interface is not fully coupled despite the absence of surface cracks. © 1998 American Institute of Physics.
P.M. Mooney, F. Legoues, et al.
Applied Physics Letters
C.-K. Hu, L. Gignac, et al.
Applied Physics Letters
P.M. Mooney, S.J. Koester, et al.
MRS Proceedings 2001
R.F. Cook, E. Liniger
MRS Spring Meeting 1998