Chidanand Apté, Fred Damerau, et al.
ACM Transactions on Information Systems (TOIS)
The chemical amplification concept was invented at IBM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies.
Chidanand Apté, Fred Damerau, et al.
ACM Transactions on Information Systems (TOIS)
Rajeev Gupta, Shourya Roy, et al.
ICAC 2006
Limin Hu
IEEE/ACM Transactions on Networking
Raymond F. Boyce, Donald D. Chamberlin, et al.
CACM