Alberto Valdes-Garcia, Sean T. Nicolson, et al.
IEEE Journal of Solid-State Circuits
We have studied the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid. It yields pure copper by pyrolytic decomposition at 150-250 °C, produces copper films with near bulk resistivity, and has the advantage of being air stable at room temperature.
Alberto Valdes-Garcia, Sean T. Nicolson, et al.
IEEE Journal of Solid-State Circuits
Petar K. Pepeljugoski, José A. Tierno, et al.
Journal of Lightwave Technology
Sudipto Chakraborty, Scott K. Reynolds, et al.
IMS 2003
Richard L. Galbraith, Scott K. Reynolds, et al.
IEEE Journal of Solid-State Circuits