J. Woodall, H. Rupprecht, et al.
IEEE T-ED
No abstract available.
J. Woodall, H. Rupprecht, et al.
IEEE T-ED
S. Chang, I.M. Vitomirov, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X. Yin, H.-M. Chen, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
T.J. De Lyon, N.I. Buchan, et al.
Applied Physics Letters