Demonstration of FinFET CMOS circuits

We present, to our knowledge, the first published experimental demonstration of a CMOS inverter chain built from FinFETs, completely integrated in 180nm CMOS technology, using one level of copper wiring and tungsten vias. A four-stage inverter chain with Lgate = 200nm, Tsi =, 60nm, and Tox = 2.2nm was run at 1.5V. We demonstrate successfully propagating CMOS levels through four inverter stages employing over 300 fins.