Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Scanning-tunneling-microscopy studies of both the n- and p-type GaAs(001)-(2×4)/c(2×8) surfaces show important differences in the Fermi-level pinning behavior of n- and p-type material. It has been shown previously that Fermi-level pinning on the n-type GaAs(001) surface results from the formation of kinks in the dimer-vacancy rows of the (2×4)/ c(2×8) surface reconstruction. These kinks form in the required number to pin the Fermi level close to midgap at all doping levels. On p-type GaAs(001) we now show that no similar surface donor state forms. As a result, at high p-doping levels (1019 cm-3 Be), the Fermi level determined by tunneling spectroscopy is found to be within 150 meV of the valence-band maximum. At lower p-doping levels the Fermi level moves towards midgap as determined by the density of ''intrinsic'' surface defects such as step edges, and missing unit cells. © 1993 The American Physical Society.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
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Surface Science
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INFORMS 2021
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures