Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The concentration of single carriers and carrier pairs bound to localized levels with negative and positive electronic correlation energy U is calculated for a semiconductor as a function of the Fermi energy. It is shown how the stability of the Fermi energy against variations of the doping level depends on the sign of the correlation energy. From this one obtains a new experimental criterion for associating a given kind of doubly charged defect with the negative-U property. © 1981 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999