J.E.E. Baglin, F.M. D'Heurle, et al.
Journal of Applied Physics
The theoretical description of transistors has been impeded by the lack of knowledge of the p-type impurity distributions. A method is described which accurately gives concentration profiles of the boron p-type regions in transistors. The technique has been used to establish that the base regions in the fastest bipolar transistors are markedly different than usually assumed. © 1972 The American Institute of Physics.
J.E.E. Baglin, F.M. D'Heurle, et al.
Journal of Applied Physics
J.F. Ziegler
Applied Physics Letters
J.F. Ziegler
IBM J. Res. Dev
Chin-An Chang, J.E.E. Baglin, et al.
Applied Physics Letters