A.J. Kellock, M.H. Tabacniks, et al.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
The theoretical description of transistors has been impeded by the lack of knowledge of the p-type impurity distributions. A method is described which accurately gives concentration profiles of the boron p-type regions in transistors. The technique has been used to establish that the base regions in the fastest bipolar transistors are markedly different than usually assumed. © 1972 The American Institute of Physics.
A.J. Kellock, M.H. Tabacniks, et al.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
K.Y. Ahn, S.R. Herd, et al.
JVSTA
M. Szabadi, P. Hess, et al.
Physical Review B - CMMP
J.E.E. Baglin, M.H. Tabacniks, et al.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms