Eric J. Zhang, Chu C. Teng, et al.
SPIE DCS 2018
A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.
Eric J. Zhang, Chu C. Teng, et al.
SPIE DCS 2018
Benjamin G. Lee, Clint L. Schow, et al.
Journal of Lightwave Technology
Joris Van Campenhout, William M. J. Green, et al.
Optics Express
Chi Xiong, Douglas M. Gill, et al.
Optica