Peter J. Price
Surface Science
Optical confinement properties of AlGaAs GRINSCH ridge lasers are sensitive to the width and the depth of the ridge. Optimum waveguide confinement requires excellent control during the ridge etch. This paper describes a Cl2 reactive ion etching process and its associated endpoint technique which achieves such process control. © 1990.
Peter J. Price
Surface Science
A. Reisman, M. Berkenblit, et al.
JES
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science