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PaperPlasma-assisted etching of tungsten films: A quartz-crystal microbalance studyF. Fracassi, J.W. CoburnJournal of Applied Physics
PaperIon-induced volatilization (IIV): A method for quantitative measurement of the amounts of perfluoropolyether lubricant on a particulate disk surface and in the media porosityJ.W. Coburn, H.F. WintersJournal of Applied Physics
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