Conference paper
Rapid annealing for shallow junction formation
Alwin E. Michel
ESSDERC 1987
Experiments were performed on n+-p-n and p+-n+-p transistors to examine the effect of boron impurity compensation on the hole current injected into the heavily arsenic-doped n-type silicon. The result shows that the impurity compensation significantly enhances the hole current only at low temperature, and has little effect at room or higher temperatures. Copyright © 1980 by The Institute of Electrical and Electronics Engineers, Inc.
Alwin E. Michel
ESSDERC 1987
Alwin E. Michel, M. Numan, et al.
Applied Physics Letters
Alwin E. Michel, Marshall I. Nathan
Applied Physics Letters
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ISSCC 1989