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JES
Paper
07 Dec 2019

Effects of oxygen on the rie characteristics of aluminum films

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Abstract

No abstract available.

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Date

07 Dec 2019

Publication

JES

Authors

  • S.P. Holland
  • Graham Olive
  • B.J. Luther
  • J.O. Moore
IBM-affiliated at time of publication

Topics

  • Physical Sciences

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  • Publication

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