Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Using thermal co-evaporation we have prepared epitaxial Cu 2ZnSnS4 (CZTS) films on Si(001) substrates. A substrate temperature as high as 370 C and proper substrate cleaning (HF-dip followed by thermal desorption of surface hydrogens) are found to be necessary for the epitaxial growth. Detailed transmission electron microscopy measurements and X-ray diffraction studies are used to reveal the orientation relation of the CZTS films with the underlying silicon substrate, and the formation of defects within the CZTS layer. © 2014 Elsevier B.V.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Sung Ho Kim, Oun-Ho Park, et al.
Small
A. Krol, C.J. Sher, et al.
Surface Science
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures