Conference paper
Hot electron emission lithography
M. Poppeller, E. Cartier, et al.
Microlithography 1999
No abstract available.
M. Poppeller, E. Cartier, et al.
Microlithography 1999
F.M. Ross, J. Tersoff, et al.
Journal of Electron Microscopy
F.M. Ross, P.A. Bennett, et al.
Micron
R.M. Tromp, M.C. Reuter
Physical Review Letters