Hsing-Kuen Liou, Edward S. Yang, et al.
Applied Physics Letters
It has been found that annealing Pd-Er deposits on a (001) silicon surface results in the formation of isolated submicron islands of Pd2Si with two epitaxially oriented habits. By contrast, when Pd is annealed on a (111) silicon substrate, Pd2Si is formed with full coverage and a specific epitaxy.
Hsing-Kuen Liou, Edward S. Yang, et al.
Applied Physics Letters
K.N. Tu
International Symposium on Methods and Materials in Microelectronic Technology 1982
B.Y. Tsaur, J.W. Mayer, et al.
Journal of Applied Physics
O. Bisi, K.N. Tu
Physical Review Letters