Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A moment method is presented for handling arbitrarily shaped 2-D and 3-D waveguides that involve conductors, finite-size dielectric regions, or both. A novel procedure for modeling the dielectric allows 2-D rooftop functions to represent both the 3-D polarization current i n the dielectric and the surface current on the conductors. Examples include microstrip and dielectric waveguides. Numerical convergence, consistency with physical principles, and agreement with the literature are demonstrated.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
John G. Long, Peter C. Searson, et al.
JES
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering