Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A Gorsky relaxation associated with the long-range diffusion of hydrogen has been observed for the first time in a metallic glass. The diffusion parameters for amorphous Pd80Si20 are QD=0.25 eV and D0=0.003 cm2/sec. From the characteristics of a complementary reorientation relaxation, it is concluded that the interstitial sites occupied by hydrogen possess a distinctly asymmetric character. © 1981 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings