Reena Elangovan, Shubham Jain, et al.
ACM TODAES
This paper is an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.
Reena Elangovan, Shubham Jain, et al.
ACM TODAES
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
S. Sattanathan, N.C. Narendra, et al.
CONTEXT 2005
Rajiv Ramaswami, Kumar N. Sivarajan
IEEE/ACM Transactions on Networking