J. Alexander Liddle, Gregg M. Gallatin, et al.
MRS Proceedings 2002
The equation for partially coherent high-numerical-aperture scalar imaging was originally derived by Cole et al. [Jpn. J. Appl. Phys. 31, 4110 (1992)]. Here I present an alternative derivation, based on the plane-wave spectral representation of propagation, which can, at least in some respects, be viewed as more straightforward. © 2001 Optical Society of America.
J. Alexander Liddle, Gregg M. Gallatin, et al.
MRS Proceedings 2002
Dario L. Goldfarb, Arpan P. Mahorowala, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Gregg M. Gallatin
SPIE Advanced Lithography 2005
Patrick P. Naulleau, Gregg M. Gallatin
Applied Optics