Skip to main content
Research
Focus areas
Blog
Publications
Careers
About
Back
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Back
About
Overview
Labs
People
Back
Semiconductors
Back
Artificial Intelligence
Back
Quantum Computing
Back
Hybrid Cloud
Back
Overview
Back
Labs
Back
People
Research
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Blog
Publications
Careers
About
Overview
Labs
People
Open IBM search field
Close
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
10 Mar 2004
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
View publication
Abstract
No abstract available.
Related
Workshop paper
S3RP: Self-Supervised Super-Resolution and Prediction for Advection-Diffusion Process
Conference paper
ComPhy: Compositional Physical Reasoning of Objects and Events from Videos
Paper
30 years of moving individual atoms
Workshop paper
Monitoring the Impact of Wildfires on Tree Species with Deep Learning
View all publications
