J.H. Stathis, R. Bolam, et al.
INFOS 2005
Paper
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
Abstract
No abstract available.
Related
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications