Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
10 Mar 2004

Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes

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Abstract

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Date

10 Mar 2004

Publication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Authors

  • Dario L. Goldfarb
  • Arpan P. Mahorowala
  • Gregg M. Gallatin
  • Karen E. Petrillo
  • Karen Temple
  • Marie Angelopoulos
  • Stacy Rasgon
  • Herbert H. Sawin
  • Scott D. Allen
  • Margaret C. Lawson
  • Ranee W. Kwong
IBM-affiliated at time of publication

Topics

  • Physical Sciences

Resources

  • Publication

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