Skip to main content
Research
  • Blog
  • Publications
  • Careers
  • Focus areas
  • Semiconductors
  • Artificial Intelligence
  • Quantum Computing
  • Hybrid Cloud
  • About
  • Overview
  • Labs
  • People
  • Semiconductors
  • Artificial Intelligence
  • Quantum Computing
  • Hybrid Cloud
  • Overview
  • Labs
  • People
IBM logo
Research
  • Focus areas
    • Semiconductors
    • Artificial Intelligence
    • Quantum Computing
    • Hybrid Cloud
  • Blog
  • Publications
  • Careers
  • About
    • Overview
    • Labs
    • People
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
10 Mar 2004

Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes

View publication

Abstract

No abstract available.

Related

Paper

Theory of temperature-induced Mott transitions

Ellen J. Yoffa, David Adler

Physical Review B

Paper

AF-Net: An Active Fire Detection Model Using Improved Object-Contextual Representations on Unbalanced UAV Datasets

Xikun Hu, Wenlin Liu, et al.

IEEE J-STARS

Conference paper

Coupling analysis of through-silicon via (TSV) arrays in silicon interposers for 3D systems

Biancun Xie, Madhavan Swaminathan, et al.

EMC 2011

Paper

Silylation of resist materials using di- and polyfunctional organosilicon compounds

E. Babich, J. Paraszczak, et al.

Microelectronic Engineering

View all publications
  1. Home
  2. ↳ Publications

Date

10 Mar 2004

Publication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Authors

  • Dario L. Goldfarb
  • Arpan P. Mahorowala
  • Gregg M. Gallatin
  • Karen E. Petrillo
  • Karen Temple
  • Marie Angelopoulos
  • Stacy Rasgon
  • Herbert H. Sawin
  • Scott D. Allen
  • Margaret C. Lawson
  • Ranee W. Kwong
IBM-affiliated at time of publication

Topics

  • Physical Sciences

Resources

  • Publication

Share

IBM Logo
  • Focus areas

    • Semiconductors
    • Artificial Intelligence
    • Quantum Computing
    • Hybrid Cloud
  • Quick links

    • About
    • Publications
    • Blog
    • Events
  • Work with us

    • Careers
    • Contact Research
  • Directories

    • Topics
    • People
    • Projects
  • Follow us

    • Newsletter
    • X
    • LinkedIn
    • YouTube
  • Contact IBM
  • Privacy
  • Terms of use
  • Accessibility