Paper
X‐ray lithography
R. Feder, E. Spiller, et al.
Polymer Engineering & Science
X-ray micrographs of biological materials have been obtained with a resolution better than 100 angstroms by using x-ray resist as the recording medium. A high-resolution scanning electron microscope with a short-focal-length final lens, operating in the "low-loss" mode, is used to make the smallest features in the x-ray replica visible.
R. Feder, E. Spiller, et al.
Polymer Engineering & Science
R. Feder, E. Spiller, et al.
Polymer Engineering & Science
N.N. Kolachevskiǐ, E. Louis, et al.
Quantum Electronics
E. Spiller, R. Feder, et al.
Science