Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- Ivan Haller
- Ralph Feder
- et al.
- 2019
- JES
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61 results for E. Spiller
Specimen replication for electron microscopy using x rays and x-ray resist
- Ralph Feder
- David Sayre
- et al.
- 2008
- Journal of Applied Physics
Application of synchrotron radiation to x-ray lithography
- E. Spiller
- D.E. Eastman
- et al.
- 2008
- Journal of Applied Physics
Smooth multilayer films suitable for x-ray mirrors
- Rolf-Peter Haelbich
- Armin Segmüller
- et al.
- 2008
- Applied Physics Letters
Controlled fabrication of multilayer soft-x-ray mirrors
- Eberhard Spiller
- Armin Segmüller
- et al.
- 2008
- Applied Physics Letters
X‐ray lithography
- R. Feder
- E. Spiller
- et al.
- 2004
- Polymer Engineering & Science
Saturable optical resonator
- Eberhard Spiller
- 2003
- Journal of Applied Physics
Low-loss reflection coatings using absorbing materials
- Eberhard Spiller
- 2003
- Applied Physics Letters
Propagation of X rays in waveguides
- Eberhard Spiller
- Armin Segmüller
- 2003
- Applied Physics Letters
Spectral characteristics of multilayer cobalt - carbon mirrors for the λ ≈ 7.5 nm range
- N.N. Kolachevskiǐ
- E. Louis
- et al.
- 1997
- Quantum Electronics