Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
A combination of diblock copolymer self-assembly and state-of-the-art semiconductor device fabrication methods is used to create highly uniform suspended porous silicon membranes. Integration of these two processing techniques is key to realizing manufacturable high quality devices. Three different methods are shown for adjusting membrane pore dimensions between 10 and 35 nm, allowing device optimization for specific applications. © 2006 American Vacuum Society.
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Imran Nasim, Melanie Weber
SCML 2024
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997