Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A general approach to porous organosilicates was derived. Hyperbranched polyesters, prepared in a single step using ROP methods, were found to be superior materials for templating nanostructures in organosilicates. Compatibilization of the polyster/MSSQ mixture on the nanoscopic size scale was facilitated by the abundant chain-end functionality of the hyperbranched polyester. Overall, the results indicate how polymer architecture can exert a tremendous influence on the physical and solution properties of a material.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000