Silsesquioxane-based photo-patternable porous low-k
- Dielectric Materials
- Jitendra S. Rathore
- et al.
- 2010
- MRS Spring Meeting 2010
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390 results for Robert Miller
Successful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration scheme
- S.V. Nitta
- S. Purushothaman
- et al.
- 2004
- IEDM 2004
Structure-property relationships for nano-porous poly(methyl-silsesquioxane) films with low-dielectric constants prepared via organic/inorganic polymer hybrids
- Cattien Nguyen
- R. Beyers
- et al.
- 1999
- ACS Spring 1999
Star-like amphiphilic block copolymers - models for unimolecular micelles and nanoreactors
- Andreas Heise
- J.L. Hedrick
- et al.
- 1999
- ACS Spring 1999
Templating nanopores into poly(methylsilsesquioxane): new low-dielectric coatings suitable for microelectronic applications
- J. Remenar
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Templating nanoporosity in organosilicates using well-defined branched macromolecules
- J.L. Hedrick
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Toughened, inorganic-organic hybrid materials for microelectronic application
- J.L. Hedrick
- S.A. Srinivasan
- et al.
- 1996
- MRS Fall Meeting 1996
Microporous crosslinked elastomers
- J.L. Hedrick
- S.A. Srinivasan
- et al.
- 1996
- MRS Spring Meeting 1996
Stability and performance issues for nonlinear optical chromophores, polymers and devices
- R.J. Twieg
- D.M. Burland
- et al.
- 1995
- MRS Spring Meeting 1995
Progress on nonlinear optical chromophores and polymers with useful nonlinearity and thermal stability
- R.J. Twieg
- D.M. Burland
- et al.
- 1993
- MRS Fall Meeting 1993