K. Gopalakrishnan, R.S. Shenoy, et al.
VLSI Technology 2010
Ultramicrotomy, the technique of cutting nanometers-thin slices of material using a diamond knife, was applied to prepare transmission electron microscope (TEM) specimens of nanoporous poly(methylsilsesquioxane) (PMSSQ) thin films. This technique was compared to focused ion beam (FIB) cross-section preparation to address possible artifacts resulting from deformation of nanoporous microstructure during the sample preparation. It was found that ultramicrotomy is a successful TEM specimen preparation method for nanoporous PMSSQ thin films when combined with low-energy ion milling as a final step. A thick, sacrificial carbon coating was identified as a method of reducing defects from the FIB process which included film shrinkage and pore deformation. © Microscopy Society of America 2006.
K. Gopalakrishnan, R.S. Shenoy, et al.
VLSI Technology 2010
Yuan Zhang, Simone Raoux, et al.
Journal of Applied Physics
Rohit S. Shenoy, Geoffrey W. Burr, et al.
Semiconductor Science and Technology
Hemanth Jagannathan, Michael Deal, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures