S. Gates, D. Neumayer, et al.
Journal of Applied Physics
The reaction of atomic hydrogen with adsorbed Br is compared on Si(100) and Si(111) surfaces from 50°C to 300°C. On both surfaces, Br removal rate is first order in atomic hydrogen flux, first-order in Br coverage, and exhibits a near zero activation energy. On Si(111), this rate also depends on surface hydrogen coverage, indicating that different mechanisms occur on these surfaces. © 1993 American Institute of Physics.
S. Gates, D. Neumayer, et al.
Journal of Applied Physics
N. Inoue, F. Ito, et al.
IITC 2013
D.D. Koleske, S. Gates, et al.
The Journal of Chemical Physics
L. Clevenger, M. Yoon, et al.
ADMETA 2004