Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Infrared photoacoustic studies of SF6 and NH3 adsorption on silver films characterized by XPS have been performed under UHV conditions with a tunable CO2 laser. The results clearly demonstrate submonolayer surface sensitivity of the photoacoustic technique. Studies of both gas-surface systems further illustrate the simplicity and general applicability of this surface vibrational technique. © 1983, American Vacuum Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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