Preface for the Festschrift Honoring Dr. Steve Rossnagel
- Ivan Petrov
- J. E. Greene
- et al.
- 2020
- JVSTA
Publications
Date
Featured collections
Popular topics
176 results at JVSTA
Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
- Grégory Abadias
- Eric Chason
- et al.
- 2018
- JVSTA
Early example of an interdisciplinary approach in industry: Harold F. Winters's contributions
- Eric Kay
- John W. Coburn
- 2017
- JVSTA
Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
- Hiroyuki Miyazoe
- Sebastian U. Engelmann
- et al.
- 2017
- JVSTA
Comparison of CO and CO2rf plasma treatment of SnO2nanoparticles for gas sensing materials
- Kimberly A. M. Hiyoto
- Erin P. Stuckert
- et al.
- 2021
- JVSTA
Etching with electron beam-generated plasmas: Selectivity versus ion energy in silicon-based films
- S. G. Walton
- D. R. Boris
- et al.
- 2021
- JVSTA
Atomic layer epitaxy of InAs with high silicon doping concentration
- Doron Cohen Elias
- Guy Cohen
- et al.
- 2020
- JVSTA
Significance of plasma-photoresist interactions for atomic layer etching processes with extreme ultraviolet photoresist
- Adam Pranda
- Kang Yi Lin
- et al.
- 2020
- JVSTA
Role of high aspect-ratio thin-film metal deposition in Cu back-end-of-line technology
- Andrew Simon
- O. Van Der Straten
- et al.
- 2020
- JVSTA
Thin film deposition research and its impact on microelectronics scaling
- Cyril Cabral
- Christian Lavoie
- et al.
- 2020
- JVSTA