Alwin E. Michel, W. Rausch, et al.
Applied Physics Letters
Alwin E. Michel, W. Rausch, et al.
Applied Physics Letters
P. Gas, V.R. Deline, et al.
Journal of Applied Physics
G. Burns, Alwin E. Michel, et al.
IEEE T-ED
Alwin E. Michel
Symposium on Process Physics and Modeling in Semiconductor Technology 1990