Conference paper
Laser - assisted chemical etching
F.A. Houle
Proceedings of SPIE 1989
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
F.A. Houle
Proceedings of SPIE 1989
F.A. Houle, R.J. Wilson, et al.
JVSTA
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SPIE Advances in Resist Technology and Processing 1999
E.E. Marinero, T.H. Baum, et al.
CLEO 1984