Introduction of role playing to a research ethics module for the undergraduate
- Dolores C. Miller
- Frances A. Houle
- et al.
- 2009
- MRS Fall Meeting 2009
Publications
Date
Featured collections
Popular topics
85 results for Frances A. Houle
Chemistry controlling nanoscale pattern formation by deep UV photolithography
- F.A. Houle
- W.D. Hinsberg
- et al.
- 1999
- ACS Spring 1999
Photostimulated desorption in laser-assisted etching of silicon
- F.A. Houle
- 1988
- Physical Review Letters
Composition, structure, and electric field variations in photodeposition
- R.J. Wilson
- F.A. Houle
- 1985
- Physical Review Letters
Characterization of vinyl ether UV-cure nanoimprint resist
- Taiichi Furukawa
- Frances A. Houle
- et al.
- 2009
- SPIE Advanced Lithography 2009
Cr migration on 193nm binary photomasks
- John Bruley
- Geoffrey Burr
- et al.
- 2009
- SPIE Advanced Lithography 2009
Quantitative measurement of resist outgassing during exposure
- Nicolae Maxim
- Frances A. Houle
- et al.
- 2009
- SPIE Advanced Lithography 2009
Chemical and mechanical properties of UV-cured nanoimprint resists and release layer interactions
- Frances A. Houle
- Ann Fornof
- et al.
- 2008
- SPIE Advanced Lithography 2008
Evaluation of 32nm Advanced immersion lithography pellicles
- N. Zhou
- K. Racette
- et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Impact of curing kinetics and materials properties on imprint characteristics of resists for UV nanoimprint lithography
- Frances A. Houle
- Ann Fornof
- et al.
- 2007
- SPIE Advanced Lithography 2007