Sung Ho Kim, Oun-Ho Park, et al.
Small
The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focused, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity. © 1994.
Sung Ho Kim, Oun-Ho Park, et al.
Small
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Ronald Troutman
Synthetic Metals