Difluorocarbene Emission Spectra from Fluorocarbon Plasmas and its Relationship to Fluorocarbon Polymer Formation
- M.M. Millard
- E. Kay
- 2019
- JES
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89 results for Eric Kay
A study of the neutral species rf sputtered from oxide targets
- J.W. Coburn
- E. Taglauer
- et al.
- 2014
- Japanese Journal of Applied Physics
Plasma polymerization
- E. Kay
- 2010
- Berichte der Bunsengesellschaft/Physical Chemistry Chemical Physics
Elemental composition profiling in thin films by glow-discharge mass spectrometry: Depth resolution
- J.W. Coburn
- E.W. Eckstein
- et al.
- 2008
- Journal of Applied Physics
Ion implantation during film growth and its effect on the superconducting properties of niobium
- G. Heim
- Eric Kay
- 2008
- Journal of Applied Physics
Plasma etching a "pseudo-black-box" approach
- Harold F. Winters
- J.W. Coburn
- et al.
- 2008
- Journal of Applied Physics
Band and hopping conduction in high-resistivity ZnO
- J. Schoenes
- K.K. Kanazawa
- et al.
- 2008
- Journal of Applied Physics
Model of bias sputtering applied to the control of nb film properties
- Eric Kay
- Gunther Heim
- 2008
- Journal of Applied Physics
Conduction mechanism in plasma-polymerized tetrafluoroethylene films
- U. Hetzler
- Eric Kay
- 2008
- Journal of Applied Physics
Metal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: Effects of hydrogen or oxygen
- E. Kay
- A. Dilks
- et al.
- 2008
- Journal of Applied Physics