Conference paper
Imaging performance and tests of soft x-ray telescopes
E. Spiller, R.A. McCorkle, et al.
Optical and Optoelectronic Applied Science and Engineering 1990
In this review of recent progress in lithography and microscopy by X-rays the authors show how X-ray lithography is used to replicate microcircuit patterns with dimensions below 1 mu m, and how these advances have improved the older technique of X-ray microradiography.
E. Spiller, R.A. McCorkle, et al.
Optical and Optoelectronic Applied Science and Engineering 1990
L.J. Terminello, A.B. McLean, et al.
Review of Scientific Instruments
E. Spiller, D.E. Eastman, et al.
Journal of Applied Physics
L. Golub, M. Herant, et al.
Nature