E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Magnetic head requirements for high aspect ratio pole tips were met using single-layer PMMA exposed at 100 kV. Using cooled mixtures of IPA and water and ultrasonic agitation, 14:1 aspect ratios in resist were demonstrated.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
R. Ghez, M.B. Small
JES
Hiroshi Ito, Reinhold Schwalm
JES