Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The magnetic specific heat of amorphous GdAl2 shows a broad maximum near 17.5 K, the temperature of the spin-glass-like cusp in the magnetic susceptibility. At low temperatures it varies as T 3 2, with a small negative intercept. This is interpreted in terms of ferromagnetic spin waves excited in regions some 35 Å in size. © 1977.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Macromolecules
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering