Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Previously [J. Appl. Phys. 83, 270 (1998)] the Pauli master equation has been argued to constitute an equation suitable for the simulation of steady-state electron transport in semiconductor devices of length L smaller than the dephasing length (Formula presented) in the contacts. Here, the master equation is derived emphasizing the role played by the dissipative interactions of the Van Hove-type, by the Markov approximation, and by the Van Hove limit in establishing irreversibility. An extension of the method to realistic band structures is also presented. Finally, the approach is applied to simulate electron transport in a simple one-dimensional Si (Formula presented) diode at 77 K. © 1999 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sung Ho Kim, Oun-Ho Park, et al.
Small
Ellen J. Yoffa, David Adler
Physical Review B
K.N. Tu
Materials Science and Engineering: A