Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
By employing the low-energy electron projection microscope for in situ visual control, it has been possible to attach or detach a fine manipulating tip to or from a carbon fiber network. In this way we were able to apply an electrical potential to a single nanometer-sized fiber while observing the electron projection images at TV rates. We also measured the maximal current through individual freestanding wires of diameter approximately 10 nm and lengths approximately 1 mu m. It turned out that these carbon wires are able to transport a current density exceeding one million A cm-2 at room temperature.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
David B. Mitzi
Journal of Materials Chemistry
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting