Microlithographic applications of silicon-containing polymers and individual organosilicon compounds

J.M. Shaw, M. Hatzakis, et al.

Polymer Engineering & Science

E. Babich, S. Rishton, et al.

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

J. Paraszczak, E. Babich, et al.

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

J. Paraszczak, D. Edelstein, et al.

IEDM 1993