Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The Cl-Cu metal chemisorption is studied using molecular orbital theory. The surface is represented by a Cu cluster. The Cu atoms are described by a relativistic effective core potential having only one (4s1) valence electron. In particular, the Cl-Cu interlayer distance is calculated in order to complement the information obtained from recent LEED and SEXAFS studies and to calibrate the theoretical approach used. © 1984.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Ellen J. Yoffa, David Adler
Physical Review B
K.A. Chao
Physical Review B