Ronald Troutman
Synthetic Metals
A report on the progress in nanofabrication technology was presented. The principles and limits of the various pattern formation techniques which have emerged as important tools in the research nanoscale devices and structures were discussed. Topics such as electron beam lithography, imprint lithography, proximal probes and self assembly were also discussed.
Ronald Troutman
Synthetic Metals
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
J.C. Marinace
JES
Lawrence Suchow, Norman R. Stemple
JES