William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
In the high-frequency limit, general expressions for second- and third-order induced electronic current densities in a medium are derived. These are valid for any medium with arbitrary spatial electronic-density variations. It is shown that the second-order current density at x-ray frequencies depends directly on the gradient of the unperturbed electronic density, so that it is sensitive to density variations both near the surface and near the ionic cores in a solid. © 1972 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
John G. Long, Peter C. Searson, et al.
JES
T.N. Morgan
Semiconductor Science and Technology
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings