X. Su, C.B. Stagarescu, et al.
Applied Physics Letters
High angular resolution x-ray microdiffraction was used to determine columnar microstructure in step-graded Si1-xGex/Si(001) structures with low threading dislocation densities. Experiments were performed with a high brilliance x-ray undulator source at the 2-ID-D end station. Rectangular columnar micrograins were found with average widths from ∼0.6 to ∼3.7 μm. Many sharp peaks of a 3- μm-thick strain-relaxed Si0.83Ge0.17 film were observed using x-ray rocking curves.
X. Su, C.B. Stagarescu, et al.
Applied Physics Letters
Guangyong Xu, D.E. Eastman, et al.
Journal of Applied Physics
X. Su, C.B. Stagarescu, et al.
Applied Physics Letters
D.E. Eastman, C.B. Stagarescu, et al.
Physical Review Letters