William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Conference paper
Orientation control of block copolymer thin films
Abstract
No abstract available.
Related
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Michael J. Maher, Charles T. Rettner, et al.
ACS AMI
Michael J. Maher, Christopher M. Bates, et al.
J. Photopolym. Sci. Tech.