U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
A process using a dry organic encapsulant as a boundary layer between an organic semiconductor (pentacene) and photolithographic chemicals was presented. Traditional photolithography was performed to pattern the material stack. High performance organic thin film transistors (OTFTs) made using the organic semiconductor pentcene showed mobilities of the order of 1 cm2V-1s-1. The process was found to be fully subtractive.
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001