PaperElectron-beam effects in depth profiling measurements with Auger electron spectroscopyJ. Ahn, C.R. Perleberg, et al.Journal of Applied Physics
PaperThe influence of ion sputtering on the elemental analysis of solid surfacesJ.W. CoburnThin Solid Films
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PaperA SIMS study of ion-assisted etching mechanisms; adsorbed fluorine on Si removed by ion bombardmentE.-A. Knabbe, J.W. Coburn, et al.Surface Science
