PaperPlasma-assisted etching: Ion-assisted surface chemistryJ.W. Coburn, Harold F. WintersApplications of Surface Science
PaperThe role of energetic ion bombardment in silicon-fluorine chemistryJ.W. Coburn, H.F. WintersNuclear Inst. and Methods in Physics Research, B
PaperIon-induced volatilization (IIV): A method for quantitative measurement of the amounts of perfluoropolyether lubricant on a particulate disk surface and in the media porosityJ.W. Coburn, H.F. WintersJournal of Applied Physics
PaperPlasma diagnostics of an rf-sputtering glow dischargeJ.W. Coburn, Eric KayApplied Physics Letters
